The method for measuring the groove density of variable-line-space gratings with elimination of the eccentricity effect
Author:
Affiliation:
1. National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei, China
Funder
National Natural Science Foundation of China (NSFC)
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4908138
Reference10 articles.
1. Monochromator for a soft X-ray photochemistry beamline BL27SU of SPring-8
2. Flat-field grating spectrometer for high-resolution soft x-ray and extreme ultraviolet measurements on an electron beam ion trap
3. Development of soft X-ray multilayer laminar-type plane gratings and varied-line-spacing spherical grating for flat-field spectrograph in the 1–8 keV region
4. Design of a Varied-line-spacing plane grating monochromator at NSRL for surface physics experiments
5. Groove Density Measurements for the VLS grating by Diffraction Method
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