Formation of a buried oxide film at the damage peak induced by oxygen implantation into a Si substrate
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.123796
Reference9 articles.
1. C.M.O.S. devices fabricated on buried SiO2 layers formed by oxygen implantation into silicon
2. Analysis of thin‐film silicon‐on‐insulator structures formed by low‐energy oxygen ion implantation
3. Practical reduction of dislocation density in SIMOX wafers
4. Analysis of buried oxide layer formation and mechanism of threading dislocation generation in the substoichiometric oxygen dose region
5. Extension of Dose Window for Low‐Dose Separation by Implanted Oxygen
Cited by 16 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Diffusion and aggregation process of oxygen embedded around an amorphous/crystal interface of Si(001) studied by molecular dynamics simulation;Journal of Applied Physics;2017-05-14
2. A novel mechanism of ultrathin SOI synthesis by extremely low-energy hot O+implantation;Journal of Physics D: Applied Physics;2016-07-19
3. Oxygen precipitates distributed around random grain boundaries in a cast-grown multicrystalline silicon crystal;Japanese Journal of Applied Physics;2016-03-15
4. Effects of annealing temperature on buried oxide precipitates in He and O co-implanted Si;Vacuum;2013-07
5. The use of nanocavities for the fabrication of ultrathin buried oxide layers;Applied Physics Letters;2009-01-05
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3