Position and pressure effects in rf magnetron reactive sputter deposition of piezoelectric zinc oxide
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.333895
Reference45 articles.
1. Structures and electrical properties of zinc oxide films prepared by low pressure sputtering system
2. Excitation of Shear Mode Elastic Waves in Co-Sputtered ZnO Films
3. Monolithically integrated Bragg deflector for an optical guided wave made of zinc-oxide film
4. Fast electro‐optic waveguide deflector modulator
5. dc triode sputtered zinc oxide surface elastic wave transducers
Cited by 107 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Mirrorless MEMS imaging: a nonlinear vibrational approach utilizing aerosol-jetted PZT-actuated fiber MEMS scanner for microscale illumination;Microsystems & Nanoengineering;2024-01-22
2. Influence of Sputtering Pressure on the Conductivity and Transparency of Aluminum-Doped Zinc Oxide Films;Applied Science and Convergence Technology;2023-11-30
3. The measurement and impact of negative oxygen ions during reactive sputter deposition;Critical Reviews in Solid State and Materials Sciences;2023-09-21
4. Physicochemical characteristics of structurally enriched Ce3+ modified ZnO nanocrystals;Journal of Sol-Gel Science and Technology;2023-09-07
5. Investigation of the Microstructure, Optical, Electrical and Nanomechanical Properties of ZnOx Thin Films Deposited by Magnetron Sputtering;Materials;2022-09-21
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3