Time-resolved measurements of ion energy distributions in dual-mode pulsed-microwave/radio frequency plasma
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.373714
Reference27 articles.
1. Reactive sputtering of TiN films at large substrate to target distances
2. Critical ion energy and ion flux in the growth of films by plasma‐enhanced chemical‐vapor deposition
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5. Ion energy distributions in pulsed large area microwave plasma
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