Epitaxial LiTaO3thin film by pulsed metalorganic chemical vapor deposition from a single precursor

Author:

Xie Huyang,Raj Rishi

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Cited by 44 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. CMOS-Integrated Aluminum Nitride MEMS: A Review;Journal of Microelectromechanical Systems;2022-08

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3. Influence of thermal annealing on structural and optical properties of RF-sputtered LiTaO3 thin films;Materials Research Express;2018-11-05

4. Toward High-Quality Epitaxial LiNbO3and LiTaO3Thin Films for Acoustic and Optical Applications;Advanced Materials Interfaces;2017-03-03

5. Synthesis and characterization of lithium tantalate thin films fabricated by sol-gel method;8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices;2016-10-25

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