Extraction of a nearly monoenergetic ion beam using a pulsed plasma
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2001129
Reference11 articles.
1. G. K. Wehner and G. S. Anderson in Handbook of Thin Film Technology, edited by L. I. Maissel and R. Glang (McGraw–Hill, New York, 1970), pp. 3–10.
2. Compact floating ion energy analyzer for measuring energy distributions of ions bombarding radio-frequency biased electrode surfaces
3. Ion energy distributions versus frequency and ion mass at the rf-biased electrode in an inductively driven discharge
4. Control of ion energy distribution at substrates during plasma processing
5. Positive‐ion bombardment of substrates in rf diode glow discharge sputtering
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