Modeling of the gas-phase chemistry in C–H–O gas mixtures for diamond chemical vapor deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1360221
Reference13 articles.
1. Towards a general concept of diamond chemical vapour deposition
2. Diamond Chemical Vapor Deposition: Gas Compositions and film Properties
3. Compositional and spectroscopic study of the growth of diamond films from several gaseous mixtures
4. On the gas-phase mechanisms in MWCVD and HFCVD diamond deposition
5. Boundaries of the diamond domain in the C - H - O diagram of carbon film deposition
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