Impact of the gas dynamics on the cluster flux in a magnetron cluster-source: Influence of the chamber shape and gas-inlet position
Author:
Affiliation:
1. Teer Coatings Ltd., West Stone House, West Stone, Berry Hill Industrial Estate, Droitwich, Worcestershire WR9 9AS, United Kingdom
2. Quantum Solid-State Physics, Department of Physics and Astronomy, KU Leuven, B-3001 Leuven, Belgium
Funder
FP7 People: Marie-Curie Actions
FP7 Nanosciences, Nanotechnologies, Materials and New Production Technologies
Fonds Wetenschappelijk Onderzoek
Onderzoeksraad, KU Leuven
Publisher
AIP Publishing
Subject
Instrumentation
Link
https://aip.scitation.org/doi/pdf/10.1063/5.0028854
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