Time-resolved diagnostics of a bipolar HiPIMS discharge
Author:
Affiliation:
1. Institute of Physics, Czech Academy of Science, Na Slovance 2, 18221 Prague, Czech Republic
2. Institut für Physik, Universität Greifswald, Felix-Hausdorff-Str. 6, 17489 Greifswald, Germany
Funder
Czech Science Foundation
Czech Ministry of Education, Youth, and Sports
Ministry of Industry and Trade of the Czech Republic
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/5.0006425
Reference32 articles.
1. A novel pulsed magnetron sputter technique utilizing very high target power densities
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5. Plasma diagnostics for understanding the plasma–surface interaction in HiPIMS discharges: a review
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