Grain growth in laser dehydrogenated and crystallized polycrystalline silicon for thin film transistors
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.357505
Reference13 articles.
1. A defect-pool model for near-interface states in amorphous silicon thin-film transistors
2. High-performance TFTs fabricated by XeCl excimer laser annealing of hydrogenated amorphous-silicon film
3. On-Chip Bottom-Gate Polysilicon and Amorphous Silicon Thin-Film Transistors Using Excimer Laser Annealing
4. Laser dehydrogenation/crystallization of plasma‐enhanced chemical vapor deposited amorphous silicon for hybrid thin film transistors
5. Integrated conventional and laser re-crystallised amorphous silicon thin film transistors for large area imaging and display applications
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