Preparation of Sn doped SiO2 films using SiO2 and SnO2 mixture powder target by magnetron sputtering deposition
Author:
Affiliation:
1. National Institute of Technology, Sasebo College
Publisher
The Materials Research Society of Japan
Link
https://www.jstage.jst.go.jp/article/tmrsj/42/3/42_73/_pdf
Reference18 articles.
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