Hermetic Protection of Rings by Ion Beam Sputter Coating with a Broad Beam Ion Source and a W-Shaped Hollow Sputter Target-Reference-Cited by-同舟云学术

Hermetic Protection of Rings by Ion Beam Sputter Coating with a Broad Beam Ion Source and a W-Shaped Hollow Sputter Target

Published:2013 Issue:1 Volume:38 Page:97-100
ISSN:1382-3469
Container-title:Transactions of the Materials Research Society of Japan
language:en
Short-container-title:Trans. Mat. Res. Soc. Japan

Author:

Ensinger Wolfgang¹,Flege Stefan¹,Hatada Ruriko¹,Ayata Sevda²,Matsutani Takaomi¹³,Baba Koumei⁴

Affiliation:

1. Darmstadt University of Technology, Department of Materials Science

2. Dokuz Eylul University, Faculty of Science, Chemistry Department

3. Kinki University, School of Science & Engineering

4. Industrial Technology Center of Nagasaki

Publisher

The Materials Research Society of Japan

Link

https://www.jstage.jst.go.jp/article/tmrsj/38/1/38_97/_pdf

Reference12 articles.

1. [1] J.J. Cuomo, S.M. Rossnagel, H.R. Kaufman (Eds.), “Handbook of Ion Beam Processing Technology”, Noyes Publication, Park Ridge, NJ (1989)

2. [2] J.A. Thornton, J.E. Greene, “Ion Beam Sputtering”, in: R.F. Bunshah (Ed.), “Handbook of Deposition Technologies for Films and Coatings”, Noyes Publication, Park Ridge, NJ (1994), p. 327

3. [3] W. Ensinger, "Protection against aqueous corrosion by ion implantation and ion beam assisted deposition", in: Y. Pauleau, P.B. Barna (Eds.), "Protective Coatings and Thin Films: Synthesis, Characterization and Applications", Kluwer Academic Publishers, Dordrecht (1997) p. 585

4. [4] J.F. Ziegler, J.P. Biersack, and U. Littmark, “Transport of Ions in Matter”, Pergamon Press, New York (1996)

5. [5] J.F. Ziegler, Nucl. Instr. Meth. Phys. Res. B 219-220, 1027-1036 (2004): Software package SRIM-2012.03

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Complete coating of metal rings by ion beam sputtering of a W-shaped concave target with a broad-beam ion source;Surface and Coatings Technology;2016-05