Affiliation:
1. Department of Electronics and Instrumentation Engineering, SRM Institute of Science and Technology, Kattankulathur, Kanchipuram
2. Research Institute, SRM Institute of Science and Technology, Kattankulathur, Kanchipuram.
Abstract
In this paper, Micro Electro Mechanical System (MEMS) based temperature sensor is designed and fabricated for weather monitoring system at troposphere level. In this design we have used meander shape, because it is easy to vary the length. We have optimized the length in this design. Due to certain advantages like low cost, easily available, high melting and boiling point, molybdenum material is used for fabrication of this design. The four meander type temperature sensors are designed with various dimensions of sizes in 6.7mm×4mm, 9.5mm×4mm, 5.2mm×4mm, 6.5mm×4mm. The Temperature Coefficient of Resistance (TCR) values for four various sensors mentioned above are 3.4 ×10-4 C-1, 3.7×10-4 C-1, 7.0×10-4 C-1, 7.5×10-4 C-1. For radiosonde applications the sensor must have high sensitivity, high degree of accuracy, good linearity and with better TCR values. The experimental results are better for dimension 6.7mm ×4mm for all characteristics mentioned above. The practical results are compared with the theoretical values.
Publisher
Oriental Scientific Publishing Company
Subject
Drug Discovery,Environmental Chemistry,Biochemistry,General Chemistry
Reference22 articles.
1. Rong-Hua Ma; Yu-Hsiang Wang; Chia-Yen Lee; “Wireless Remote Weather Monitoring System Based on MEMS Technologies”, Sensors, 2011, 11, 2715-2727
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