Micro-fabricated flexible PZT cantilever using d33 mode for energy harvesting
Author:
Funder
National Research Foundation of Korea
Publisher
Springer Science and Business Media LLC
Subject
Biomedical Engineering,Biomaterials
Link
http://link.springer.com/content/pdf/10.1186/s40486-017-0054-x.pdf
Reference14 articles.
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4. Elfrink R, Kamel T, Goedbloed M, Matova S, Hohlfeld D, Van Andel Y et al (2009) Vibration energy harvesting with aluminum nitride-based piezoelectric devices. J Micromech Microeng 19:094005
5. Shen D, Park J-H, Noh JH, Choe S-Y, Kim S-H, Wikle HC III et al (2009) Micromachined PZT cantilever based on SOI structure for low frequency vibration energy harvesting. Sens Actuators A 154:103–108
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