FABRICATION OF QCM TYPE SMOTHER DETECTION SENSOR BY PLASMA POLYMERIZING SnOx ORGANIC-LIKE FILMS AND SPIN COATING WITH POLY ETHYLENE GLYCOL

Abstract

Quartz crystal microbalances (QCM) are transducers for chemical and biochemical sensing. The oscillation frequency of QCM is affected by the adsorbed mass on the surface. In this work, a new room temperature type gas sensor device fabricated by organically hybridized plasma deposition of tetramethyltin (TMT) and oxygen. Post treatment with poly ethylene glycol (PEG) was developed to detect the ambient environmental smother, and the responses of the fabricated sensor to smother detection were investigated. SnO x C y thin films on the sensor electrodes were obtained by plasma deposition from TMT and O 2 gas mixtures at room temperature. A spin coating post treatment on the SnO x C y thin films turns into hydrophilic property. The response of the QCM sensor to the smother detection shows a frequency drop during the burning of candle and has good detection sensitivity with Δf equal to 2400 Hz. Repeated smother testing with the QCM type smother detection sensor also indicates the stability of the fabricated sensor.