Ion Beam Sputtering for High Resolution Depth Profiling
Author:
Affiliation:
1. Department of Physics, Chungbuk National University
2. Korea Research Institute of Standards and Science
3. AE Center, Samsung Advanced Institute of Technology
Publisher
Surface Analysis Society of Japan
Link
https://www.jstage.jst.go.jp/article/jsa/15/3/15_216/_pdf
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5. [5] D.W. Oh, S.K. Oh, H.J. Kang, H.I. Lee, D.W. Moon, Nucl. Instr. and Meth. B 190, 598 (2002).
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