Investigation of the Dependence of the Silicon Needle Shape on the KOH Solution Concentration during Anisotropic Wet Etching
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Publisher
Pleiades Publishing Ltd
Link
https://link.springer.com/content/pdf/10.1134/S1063782623010074.pdf
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1. Silicon flow stop frame for encapsulation of CMOS microsensor chips by wet anisotropic etching in KOH;Engineering Research Express;2024-04-10
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