Details of how to mount high-precision optics-Reference-Cited by-同舟云学术

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Details of how to mount high-precision optics

Published:2010-06 Issue:3 Volume:4 Page:359-365
ISSN:1027-4510
Container-title:Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
language:en
Short-container-title:J. Synch. Investig.

Author:

Salashchenko N. N.,Toropov M. N.,Chkhalo N. I.

Publisher

Pleiades Publishing Ltd

Subject

Surfaces, Coatings and Films

Link

http://link.springer.com/content/pdf/10.1134/S1027451010030018.pdf

Reference5 articles.

1. M. A. Okatov, E. A. Antonov, A. Baigozhin, et al., Manual of Optical Engineer, Ed. by M. A. Okatov (Politekhnika, St.-Petersburg, 2004) [in Russian].

2. E. B. Klyuenkov, A. E. Pestov, V. N. Polkovnikov, et al., Ross. Nanotekhnol. 3(9–10), 90 (2008).

3. A. Yu. Klimov, V. V. Rogov, N. N. Salashchenko, and N. I. Chkhalo, Izv. RAN, Ser. Fiz. 72, 221 (2008).

4. N. I. Chkhalo, A. Yu. Klimov, V. V. Rogov, N. N. Salashchenko, and M. N. Toropov, Rev. Sci. Instrum. 79, 033107 (2008).

5. N. N. Salashchenko and N. I. Chkhalo, Vestn. Ross. Akad. Nauk 78(5), 13 (2008).

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Principles of certification of aspherical mirrors for an EUV lithography lens at a wavelength of 13.5 nm;Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques;2015-07

2. Device for the precise shape correction of optical surfaces by ion-beam and reactive plasma etching;Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques;2013-09

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