1. A. I. Gusev, Nanomaterials, Nanostructures, Nanotechnologies (Fizmatlit, Moscow, 2005) [in Russian].
2. R. A. Andrievskii and A. V. Ragulia, Nanostructural Materials (Akademiia, Moscow, 2005) [in Russian].
3. V. Yu. Vasilev and S. M. Repinsky, “Chemical vapour deposition of thin-film dielectrics,” Russ. Chem. Rev. 74, 413–441 (2005).
4. A. V. Tikhonravov, A. V. Kochikov, T. V. Amochkina, F. V. Grigorev, O. A. Kondakova, and V. B. Sulimov, “High performance modeling of modern deposition processes for optical coating nanotechnology,” Vychisl. Metody Programm. 13, 491–496 (2012).
5. F. F. Komarov, V. V. Pilko, and I. M. Klimovich, “Influence of conditions employed in application of Ti-Zr-Si-N nanostructured coatings on their composition, structure, and tribomechanical properties,” J. Eng. Phys. Thermophys. 88, 358–363 (2015).