Doped anodic oxide films obtained on silicon and silicon compounds: Preparation, properties, and application

Author:

Mileshko L. P.

Publisher

Pleiades Publishing Ltd

Subject

Materials Chemistry,Metals and Alloys,Inorganic Chemistry,General Chemical Engineering

Reference92 articles.

1. Mileshko, L.P. and Korolev, A.N., Anodic Oxide Films Formed on Silicon and Silicon Compounds in Doping Electrolytes, Trudy decyatoi mezhdunarodnoi nauchnoi konf. i shkoly-seminara: actual’nye problemy tverdotel’noi electroniki i mikroelectroniki (Proc. Tenth International Scientific Conf. and School-Seminar: The Topical Problems in Solid-State Electronics and Microelectronics), Taganrog: TRTU, 2006, vol. 1, pp. 28–30.

2. Mileshko, L.P., Attainments and Outlook for Doped Oxide Films in the Technology of Semiconductor Devices and ICs, Izv. TRTU, spetsial’nyi vypusk, Trudy XLVIII nauchno-technich. konf. TRTU (Izv. TRTU, Special Issue: Proc. XLVIII Scientific and Technical Conf. of TRTU), Taganrog: TRTU, 2003, no. 1(30), p. 210.

3. Baraban, A.P., Bulavinov, V.V., and Konorov, P.P., Elektronika sloev SiO 2 na kremnii (Electronics in SiO2 Layers on Silicon), Leningrad: LGU, 1988.

4. Chistyakov, Yu.D., Bredikhin, I.S., and Mileshko, L.P., Anodic Silicon Oxide Films as a Solid-State Diffusant in Planar Technology, Zarubezhnaya Elektron. Tekh., Moscow: TsNII Elektronika, 1976, no. 1(134), pp. 3–38.

5. Sorokin, I.N., Sechenov, D.A., Mileshko, L.P., et al., Metodich. ukazan. po izuchen. kursa: “Fiz.-khim. protsessy v tekhnol. radioelektr. apparat. (REA)” po teme electrokhim. protsessy v tekhnol. REA, Chast’ II, Anodnoe okislenie (Methodical Instructions on the Study of Manual on Physicochemical Processes in Technology of Radio-Electronic Instrumentation (REI) on the Subject of Electrochemical Processes in REI Technology: Part II, Anodic Oxidation), Taganrog: TRTI, 1986, 83 p.

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