Compression of a Beam of Fast Argon Atoms for Surface Polishing

Abstract

Abstract The results of studying a beam source of fast argon atoms obtained by neutralizing charges of accelerated ions during their flight through an accelerating grid in the form of a set of plane–parallel plates are presented. Ions are accelerated from the plasma emitter by a voltage of negative polarity at the grid, fly into the gaps between its plates, and, when approaching their surfaces, cause the emission of electrons that neutralize the ion charge. The equivalent beam current of fast atoms emitted from the grid is up to 90% of the current in its circuit, and their energy is equal to the ion energy that corresponds to the accelerating voltage between the plasma emitter and the grid. To increase the beam current density of fast atoms on the treated surface, the sections of the grid plates facing the plasma emitter are made in the form of a segment of a circle. The movement of ions and fast atoms that are formed inside the grid to the center of this circle makes it possible to reduce the beam width by an order of magnitude and increase the flow density of fast atoms without reducing the angle of their incidence on the treated surface. The beam compression significantly improves the efficiency of polishing a surface with a beam of fast neutral argon atoms with an angle of incidence on the surface of 80°.