Author:
Zhukeshov A. M.,Gabdullina A. T.,Amrenova A. U.,Abdraimova G. A.,Mukhamedryskyzy M.
Subject
Physics and Astronomy (miscellaneous)
Reference11 articles.
1. M. A. Lieberman and A. G. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, New York, 1994).
2. S. Tomida and K. Nakata, Surf. Coat. Technol. 174–175, 559 (2003).
3. J. Piekoszewski, Nukleonika 45, 193 (2000).
4. V. I. Tereshin et al., Rev. Sci. Instrum. 73 (2), 1 (2002).
5. V. V. Uglov, A. K. Kuleshov, E. A. Soldatenko, N. N. Koval, Yu. F. Ivanov, A. D. Teresov, Surf. Coat. Technol. 206, 2972 (2012).