Effect of Oxygen Partial Pressure on the Stoichiometric Composition of Titanium Oxide Films during Magnetron Sputtering
Author:
Publisher
Pleiades Publishing Ltd
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
https://link.springer.com/content/pdf/10.1134/S1063783421100061.pdf
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1. Charge carrier transport in silicon heterojunctions with a thin titanium oxide layer;Journal of Materials Science: Materials in Electronics;2024-07
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