Extreme-ultraviolet source based on the electron-cyclotron-resonance discharge-Reference-Cited by-同舟云学术

Extreme-ultraviolet source based on the electron-cyclotron-resonance discharge

Author:

Vodopyanov A. V.,Golubev S. V.,Mansfeld D. A.,Nikolaev A. G.,Savkin K. P.,Salashchenko N. N.,Chkhalo N. I.,Yushkov G. Yu.

Publisher

Pleiades Publishing Ltd

Subject

Physics and Astronomy (miscellaneous)

Link

Reference18 articles.

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5. I. V. Fomenkov, N. R. Bowering, A. I. Ershov, et al., in Proc. of SEMATECH EUVL Symposium, Barcelona, Spain, 2006.

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