Laser-induced structural changes in magnetron-sputtered hydrogenated microcrystalline silicon films
Author:
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevB.43.4503/fulltext
Reference16 articles.
1. Raman study of amorphous to microcrystalline phase transition in cw laser annealeda‐Si:H films
2. cw laser annealing of hydrogenated amorphous silicon obtained by rf sputtering
3. Substitutional doping of amorphous silicon
4. Glow-Discharge Deposition of a-Si: H from Pure Si2H6and Pure SiH4
5. Hydrogenated amorphous silicon prepared by ArF and F2excimer laser‐induced photochemical vapor deposition
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4. Effect of the Nanoparticles on the Structure and Crystallization of Amorphous Silicon Thin Films Produced by rf Glow Discharge;Journal of Materials Research;1998-09
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