Resistive model of the rf discharge including additional dc currents and electrodes
Author:
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevE.47.591/fulltext
Reference46 articles.
1. Asymmetrical Triple Probe Method for Determining Energy Distribution of Electron in Plasma
2. Positive‐ion bombardment of substrates in rf diode glow discharge sputtering
3. A tuned Langmuir probe for measurements in rf glow discharges
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5. Time‐resolved plasma parameter measurements in a low‐frequency rf glow discharge
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