Spatiotemporal characteristics of the collisionless rf sheath and the ion energy distributions arriving at rf-biased electrodes
Author:
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevE.65.036403/fulltext
Reference22 articles.
1. Application of the physics of plasma sheaths to the modeling of rf plasma reactors
2. Analytical solution for capacitive RF sheath
3. Dynamics of a collisional, capacitive RF sheath
4. Dynamic model of the electrode sheaths in symmetrically driven rf discharges
5. Solving the Mathematical Model of the Electrode Sheath in Symmetrically Driven RF Discharges
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