Dynamic model of the radio-frequency plasma sheath in a highly asymmetric discharge cell
Author:
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevE.56.1001/fulltext
Reference22 articles.
1. Analytical solution for capacitive RF sheath
2. Dynamics of a collisional, capacitive RF sheath
3. Dynamic model of the electrode sheaths in symmetrically driven rf discharges
4. Subharmonics and rf-plasma sheaths
5. Nonlinearity of the radio‐frequency sheath
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2. Capacitive and resistive double sheath model in an asymmetric radio frequency plasma discharge;Physics of Plasmas;2015-08
3. Fundamental investigations of capacitive radio frequency plasmas: simulations and experiments;Plasma Physics and Controlled Fusion;2012-11-21
4. Effects of Ion Temperature on Collisionless and Collisional RF Sheath;Plasma Science and Technology;2006-09
5. Spatial distribution of electron characteristic in argon rf glow discharges;Chinese Physics;2006-05
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