Algorithms for numerical simulation of radio-frequency glow discharges
Author:
Publisher
American Physical Society (APS)
Subject
Atomic and Molecular Physics, and Optics
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevA.41.6949/fulltext
Reference16 articles.
1. A Continuum Model of DC and RF Discharges
2. Numerical model of rf glow discharges
3. Continuum modeling of argon radio frequency glow discharges
4. Large‐signal time‐domain modeling of low‐pressure rf glow discharges
5. Comparison of experimental measurements and model predictions for radio‐frequency Ar and SF6 discharges
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