Plasma-Surface Reactions at a Spinning Wall
Author:
Publisher
American Physical Society (APS)
Subject
General Physics and Astronomy
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevLett.96.018306/fulltext
Reference20 articles.
1. Kinetics of the CO+N2O Reaction over Noble Metals
2. Emissions of nitrous oxide from combustion sources
3. NO x and N2O Formation Mechanisms—A Detailed Chemical Kinetic Modeling Study on a Single Fuel Particle in a Laboratory-Scale Fluidized Bed
4. Heterogeneous reactivity of the nitrate radical: reactions on halogen salt at ambient temperature and on ice in the presence of HX (X=Cl, Br, I) at 190 K
5. Laser-induced thermal desorption as anin situsurface probe during plasma processing
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