Transport of dust particles in glow-discharge plasmas
Author:
Publisher
American Physical Society (APS)
Subject
General Physics and Astronomy
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevLett.68.313/fulltext
Reference18 articles.
1. In situ laser diagnostic studies of plasma‐generated particulate contamination
2. Modulated discharges: Effect on plasma parameters and deposition
3. Particulate generation in silane/ammonia rf discharges
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