Attenuation of 7 GHz surface acoustic waves on silicon
Author:
Funder
Ministry of Education, Culture, Sports, Science, and Technology
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevB.94.104306/fulltext
Reference54 articles.
1. Nanoelectromechanical systems
2. Thermoelastic damping in micro- and nanomechanical systems
3. High-Q silicon optomechanical microdisk resonators at gigahertz frequencies
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