Irradiation-induced densification of cluster-assembled thin films
Author:
Publisher
American Physical Society (APS)
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevB.79.045411/fulltext
Reference39 articles.
1. Thin films from energetic cluster impact: A feasibility study
2. Filling of micron‐sized contact holes with copper by energetic cluster impact
3. Thin films from energetic cluster impact; experiment and molecular dynamics simulations
4. Size dependent epitaxial cluster deposition: The effect of deposition energy
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