Growth mechanism of [100]-oriented TaON film through an endotaxial transformation from a (012)-LiTaO3 single crystal substrate

Author:

Qin Xuesen1,Li Huiliang2ORCID,Wang Zeyan1ORCID,Zheng Zhaoke1ORCID,Wang Peng1ORCID,Cheng Hefeng1,Liu Yuanyuan1ORCID,Fan Yuchen3,Dai Ying4ORCID,Huang Baibiao1ORCID

Affiliation:

1. State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, China

2. Department of Chemistry, College of Science, Hebei Agricultural University, Baoding 071001, China

3. Department of Hepatology, Qilu Hospital, Cheeloo College of Medicine, Shandong University, Jinan 250012, China

4. School of Physics, Shandong University, Jinan 250100, China

Abstract

An endotaxial transformation growth mechanism has been proposed, which enables the successful fabrication of [100]-oriented free-standing TaON film from a (012)-LiTaO3 single crystal substrate through a CCl4-assisted nitridation process.

Funder

National Key Research and Development Program of China

National Natural Science Foundation of China

Natural Science Foundation of Shandong Province

Shandong University

Publisher

Royal Society of Chemistry (RSC)

Subject

Condensed Matter Physics,General Materials Science,General Chemistry

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