1. Department of Micro and Nanosystems
2. KTH Royal Institute of Technology
3. SE-100 44 Stockholm
4. Sweden
5. Department of Photonics and Optical Information Technologies
6. ITMO University
7. 197101 Saint Petersburg
8. Russian Federation
9. Department of Electronics and Nanoengineering
10. Aalto University
11. Finland
12. Center for Terahertz Research and Applications (CENTERA)