Metastable states in sputtered sample atoms: a tutorial review in perspective of elementary plasma processes

Author:

Mushtaq Sohail1ORCID

Affiliation:

1. OSAM Consultants Private Limited, Pak Arab Society, Lahore, Pakistan

Abstract

This tutorial review covers the terms scheme, energy levels, and populating/depopulating processes for the atomic metastable states of sputtered and analytically interesting atoms.

Publisher

Royal Society of Chemistry (RSC)

Subject

Spectroscopy,Analytical Chemistry

Reference50 articles.

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2. R. D.Rundel and R. F.Stebbings , The role of metastable particles in collision processes , in Case Studies in Atomic Collision Physics II , ed. E. W. McDaniel and M. R. C. McDowell , North-Holland Publishing Company , Amsterdam, London , 1972 , ch. 8

3. Penning ionization

4. �ber den Einflu� sehr geringer Beimischungen auf die Z�ndspannung der Edelgase

5. Determination of the townsend. Ionization coefficient α for mixtures of neon and argon

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