1. Micro and Nano System Research Center
2. Key Lab of Advanced Transducers and Intelligent Control System (Ministry of Education)
3. College of Information Engineering
4. Taiyuan University of Technology
5. Taiyuan 030024
6. Research Center on Advanced Materials Science and Technology
7. China
8. Ecole Normale Supérieure
9. CNRS-ENS-UPMC UMR 8640
10. Paris 75005
11. France