AFM-thermoreflectance for simultaneous measurements of the topography and temperature
Author:
Affiliation:
1. Department of Mechanical Engineering
2. Korea Advanced Institute of Science and Technology
3. Daejeon 34141
4. South Korea
Abstract
We propose a novel form of AFM-based thermometry capable of sub-100 nm spatial resolution only with a conventional AFM setup by exploiting the thermoreflectance characteristic of the AFM Si probe.
Funder
National Research Foundation of Korea
Publisher
Royal Society of Chemistry (RSC)
Subject
General Chemical Engineering,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2018/RA/C8RA05937C
Reference48 articles.
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