Atomic layer deposition for nanomaterial synthesis and functionalization in energy technology

Author:

Meng Xiangbo1234ORCID,Wang Xinwei56789,Geng Dongsheng101112139ORCID,Ozgit-Akgun Cagla14151617,Schneider Nathanaelle1819202122,Elam Jeffrey W.2324254

Affiliation:

1. Department of Mechanical Engineering

2. University of Arkansas

3. Fayetteville

4. USA

5. School of Advanced Materials

6. Shenzhen Graduate School

7. Peking University

8. Shenzhen 518055

9. China

10. Center for Green Innovation

11. School of Mathematics and Physics

12. University of Science and Technology Beijing

13. Beijing 100083

14. ASELSAN Inc. – Microelectronics

15. Guidance and Electro-Optics Business Sector

16. Ankara 06750

17. Turkey

18. Institut de Recherche et Développement sur l'Energie Photovoltaïque (IRDEP, UMR 7174, EDF-CNRS-Chimie ParisTech)

19. 78401 Chatou

20. France

21. Institut Photovoltaïque d'Ile de France (IPVF)

22. 92160 Antony

23. Energy Systems Division

24. Argonne National Laboratory

25. Argonne

Abstract

This review article summarizes the recent progress of atomic layer deposition (ALD) in energy technologies including rechargeable secondary batteries, fuel cells, photovoltaics, and optoelectronics.

Funder

National Science Foundation

Basic Energy Sciences

Publisher

Royal Society of Chemistry (RSC)

Subject

Electrical and Electronic Engineering,Process Chemistry and Technology,Mechanics of Materials,General Materials Science

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