Thermoelectric characterization of crystalline nano-patterned silicon membranes-Reference-Cited by-同舟云学术

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Thermoelectric characterization of crystalline nano-patterned silicon membranes

Published:2024 Issue:14 Volume:5 Page:5998-6006
ISSN:2633-5409
Container-title:Materials Advances
language:en
Short-container-title:Mater. Adv.

Author:

Ikzibane Hafsa¹^ORCID,Patil Akash¹²,Canosa Jon¹,Okada Etienne¹,Blandre Etienne¹,Dubois Emmanuel¹,Robillard Jean-François¹

Affiliation:

1. Univ. Lille, CNRS, Centrale Lille, Junia, Univ. Polytechnique Hauts-de-France, UMR 8520 – IEMN – Institut d’Electronique de Microélectronique et de Nanotechnologie, F-59000 Lille, France

2. STMicroelectronics – 850 rue jean Monnet 38920 Crolles, France

Abstract

Thermoelectric characterization of built-in devices designed using a silicon-on-insulator substrate to extract the Seebeck coefficient, electrical conductivity and thermal conductivity of 60 nm thick crystalline silicon membranes.

Funder

Université de Lille

FP7 Ideas: European Research Council

Agence Nationale de la Recherche

Publisher

Royal Society of Chemistry (RSC)

Link

http://pubs.rsc.org/en/content/articlepdf/2024/MA/D4MA00095A

Reference55 articles.

1. A CMOS compatible thermoelectric device made of crystalline silicon membranes with nanopores

2. Characterization of a Bulk-Micromachined Membraneless In-Plane Thermopile

3. Design, Fabrication, and Characterization of CMOS MEMS-Based Thermoelectric Power Generators

4. Micropower thermoelectric generator from thin Si membranes

5. Monolithically integrated thermoelectric energy harvester based on silicon nanowire arrays for powering micro/nanodevices

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