1. Key Laboratory of Thin Film and Microfabrication (Ministry of Education)
2. Department of Micro/Nano Electronics
3. School of Electronics
4. Information and Electrical Engineering
5. Shanghai Jiao Tong University
6. State Key Laboratory of Functional Materials for Informatics
7. Shanghai Institute of Microsystem and Information Technology
8. Chinese Academy of Sciences
9. Shanghai 200050
10. China