Impact of postdeposition annealing on the sensing and impedance characteristics of TbYxOy electrolyte–insulator–semiconductor pH sensors-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Impact of postdeposition annealing on the sensing and impedance characteristics of TbYxOy electrolyte–insulator–semiconductor pH sensors

Published:2016 Issue:80 Volume:6 Page:76673-76678
ISSN:2046-2069
Container-title:RSC Advances
language:en
Short-container-title:RSC Adv.

Author:

Pan Tung-Ming¹²³⁴⁵,Chen Ching-Yi¹²³⁴,Wu Tung-Yu¹²³⁴,Pang See-Tong⁵⁶³⁴

Affiliation:

1. Department of Electronics Engineering

2. Chang Gung University

3. Taoyuan 33302

4. Taiwan

5. Division of Urology

6. Chang Gung Memorial Hospital

Abstract

In this investigation, we explored the impact of postdeposition annealing (PDA) on the sensing and impedance characteristics of TbY_xO_y sensing films deposited on Si(100) substrates through reactive cosputtering for electrolyte–insulator–semiconductor (EIS) pH sensors.

Funder

Chang Gung Memorial Hospital, Linkou

Ministry of Science and Technology, Taiwan

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2016/RA/C6RA11377J

Reference34 articles.

1. Development of an Ion-Sensitive Solid-State Device for Neurophysiological Measurements

2. Thirty years of ISFETOLOGY

3. Detecting Both Physical and (Bio-)Chemical Parameters by Means of ISFET Devices

4. Recent advances in biologically sensitive field-effect transistors (BioFETs)

5. Hysteresis in Al2O3-gate ISFETs

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A comprehensive review of FET‐based pH sensors: materials, fabrication technologies, and modeling;Electrochemical Science Advances;2021-10-03

2. Impact of yttrium concentration on structural characteristics and pH sensing properties of sol-gel derived Y2O3 based electrolyte-insulator-semiconductor sensor;Materials Science in Semiconductor Processing;2020-01

3. Investigation of Sc2O3 Based All-Solid-State EIS Structure for AlGaN/GaN HEMT pH Sensor;2019 IEEE SENSORS;2019-10

4. Detection of PCR-Amplified Tuberculosis DNA Fragments with Polyelectrolyte-Modified Field-Effect Sensors;Analytical Chemistry;2018-05-17

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3