UV-light microscope: improvements in optical imaging for a secondary ion mass spectrometer

Author:

Kita Noriko T.12345,Sobol Peter E.12345,Kern James R.12345,Lord Neal E.12345,Valley John W.12345

Affiliation:

1. WiscSIMS

2. Department of Geoscience

3. University of Wisconsin-Madison

4. Madison

5. USA

Abstract

In situ analysis by secondary ion mass spectrometer (SIMS) and other in situ techniques requires accurate aiming of the sample surface at μm scale. Modification of the reflected-light microscope system of an IMS 1280 SIMS to use ultraviolet light illumination improved the optical resolution from 3.5 μm to 1.3 μm.

Funder

National Science Foundation

Publisher

Royal Society of Chemistry (RSC)

Subject

Spectroscopy,Analytical Chemistry

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