UV-light microscope: improvements in optical imaging for a secondary ion mass spectrometer
Author:
Affiliation:
1. WiscSIMS
2. Department of Geoscience
3. University of Wisconsin-Madison
4. Madison
5. USA
Abstract
In situ analysis by secondary ion mass spectrometer (SIMS) and other in situ techniques requires accurate aiming of the sample surface at μm scale. Modification of the reflected-light microscope system of an IMS 1280 SIMS to use ultraviolet light illumination improved the optical resolution from 3.5 μm to 1.3 μm.
Funder
National Science Foundation
Publisher
Royal Society of Chemistry (RSC)
Subject
Spectroscopy,Analytical Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2015/JA/C4JA00349G
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