Electrostatic crosslinking-enabled highly asymmetric lamellar nanostructures of polyzwitterionic block copolymers for lithography
Author:
Affiliation:
1. State Key Laboratory of Motor Vehicle Biofuel Technology, International Research Center for X Polymers, Department of Polymer Science and Engineering, Zhejiang University, Hangzhou 310027, China
Abstract
Funder
National Natural Science Foundation of China
Publisher
Royal Society of Chemistry (RSC)
Subject
General Materials Science
Link
http://pubs.rsc.org/en/content/articlepdf/2023/NR/D3NR00073G
Reference35 articles.
1. Nanomanufacturing: A Perspective
2. Lithography, metrology and nanomanufacturing
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4. Silicon-containing block copolymers for lithographic applications
5. Nanopatterning via Solvent Vapor Annealing of Block Copolymer Thin Films
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