Self-assembled titanium calcium oxide nanopatterns as versatile reactive nanomasks for dry etching lithographic transfer with high selectivity-Reference-Cited by-同舟云学术

Self-assembled titanium calcium oxide nanopatterns as versatile reactive nanomasks for dry etching lithographic transfer with high selectivity

Published:2013 Issue:3 Volume:5 Page:984-990
ISSN:2040-3364
Container-title:Nanoscale
language:en
Short-container-title:Nanoscale

Author:

Faustini Marco,Drisko Glenna L.,Letailleur Alban A.,Montiel Rafael Salas,Boissière Cédric,Cattoni Andrea,Haghiri-Gosnet Anne Marie,Lerondel Gilles,Grosso David

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science

Link

http://pubs.rsc.org/en/content/articlepdf/2013/NR/C2NR33341D

Reference30 articles.

1. Towards Green Electronics in Europe, Strategic Research Agenda Organic & Large Area Electronics, in http://www.photonics21.org/download/olae_sra.pdf, 2009

2. Unconventional Methods for Fabricating and Patterning Nanostructures

3. Reading and Writing with Electron Beams

4. Sub-10 nm imprint lithography and applications

Cited by 19 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. In situ infrared spectroscopic ellipsometry as a tool to probe the formation of sol–gel based mesoporous films;Journal of Sol-Gel Science and Technology;2023-09-15

2. Confining the growth of mesoporous silica films into nanospaces: towards surface nanopatterning;Nanoscale Advances;2022

3. Block‐Copolymers Enable Direct Reduction and Structuration of Noble Metal‐Based Films;Small;2021-11-25

4. Replacing Metals with Oxides in Metal-Assisted Chemical Etching Enables Direct Fabrication of Silicon Nanowires by Solution Processing;Nano Letters;2021-02-18

5. Progress and perspective on polymer templating of multifunctional oxide nanostructures;Journal of Applied Physics;2020-11-21