Synthesis and evaluation of κ2-β-diketonate and β-ketoesterate tungsten(vi) oxo-alkoxide complexes as precursors for chemical vapor deposition of WOx thin films
Author:
Affiliation:
1. Department of Chemistry
2. University of Florida
3. Gainesville
4. 32611-7200 USA
5. Department of Chemical Engineering
6. 32611-6005 USA
7. Arkema Inc.
8. King of Prussia
9. 19406 USA
Abstract
β-Diketonate and β-ketoesterate tungsten(vi) oxo-alkoxide complexes were synthesized and CVD of WOx from WO(OCH2C(CH3)3)3(tbac) was demonstrated.
Funder
Division of Chemistry
Publisher
Royal Society of Chemistry (RSC)
Subject
Inorganic Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2016/DT/C6DT01078D
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