1. Institute of Microelectronics and Department of Electrical Engineering
2. National Cheng Kung University
3. Tainan 701
4. Taiwan
5. National Nano Device Laboratories
6. National Applied Research Laboratories
7. Tainan 741
8. Department of Mechanical Engineering
9. National Kaohsiung University of Applied Science
10. Kaohsiung 807
11. Department of Physics