Silicon-nanoforest-based solvent-free micro-supercapacitors with ultrahigh spatial resolution via IC-compatible in situ fabrication for on-chip energy storage

Author:

Chi Cheng12345,Li Dezhao67895,Li Yang1011125,Qi Xin12345,Huang He1011125,Wang Qi1011125,Lin Chongjia1011125,Zhang Xing12345,Ma Weigang12345,Huang Baoling101112513ORCID

Affiliation:

1. Key Laboratory for Thermal Science and Power Engineering of Ministry of Education

2. Department of Engineering Mechanics

3. Tsinghua University

4. Beijing

5. China

6. Key Laboratory of Quantum Precision Measurement of Zhejiang Province

7. College of Science

8. Zhejiang University of Technology

9. Hangzhou

10. Department of Mechanical and Aerospace Engineering

11. The Hong Kong University of Science and Technology

12. Hong Kong SAR

13. HKUST Foshan Research Institute for Smart Manufacturing

Abstract

Through an IC-compatible in situ approach, 3D silicon/nickel nanoforest based on-chip MSCs achieved ultrahigh spatial resolution and excellent electrochemical performance.

Funder

Innovation and Technology Fund

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science,Renewable Energy, Sustainability and the Environment,General Chemistry

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