Control of the intrinsic microstructure in AP-PECVD synthesised amorphous silica thin films
Author:
Affiliation:
1. FUJIFILM Manufacturing Europe B.V.
2. 5000 LJ Tilburg
3. The Netherlands
4. Eindhoven University of Technology
5. Applied Physics
6. 5600 MB Eindhoven
7. DIFFER – Dutch Institute for Fundamental Energy Research
8. 5600 HH Eindhoven
Abstract
The lattice porosity of flexible silica encapsulation films can be regulated by varying the specific energy during the AP-PECVD process.
Funder
FP7 People: Marie-Curie Actions
Publisher
Royal Society of Chemistry (RSC)
Subject
General Chemical Engineering,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2017/RA/C7RA10975J
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1. Material challenge for flexible organic devices
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