Metal oxide resistive memory with a deterministic conduction path

Author:

Lee Sunghwan1234,Seo Shem1234,Lim Jinho1234,Jeon Dasom1234,Alimkhanuly Batyrbek1234,Kadyrov Arman1234,Lee Seunghyun1234ORCID

Affiliation:

1. Department of Electronic Engineering

2. Kyunghee University

3. Yongin-si

4. Republic of Korea

Abstract

In this study, a Ge–Sb–Te ternary chalcogenide layer that functions as a conductive lead is added to a HfO2-based RRAM layer to improve the memory switching reproducibility and reduce HRS/LRS variations.

Funder

Korea Evaluation Institute of Industrial Technology

Ministry of Education

Ministry of Trade, Industry and Energy

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

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